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Analysis of Helium Ion Chromatography with Carbon Tetrafluoride
The helium ion chromatograph is suitable for detecting trace impurities in gases used in the electronic industry, with a small detection concentration
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Analysis of Helium Ion Chromatography with Carbon TetrafluorideEquipped with a highly sensitive helium ionization detector and using the central cutting technology of Huaai Company, the injection valves are all equipped with blow protection gas paths; The whole machine adopts a multi column box design and is equipped with an automatic calibration system for injection pressure to ensure the injection volume of samples with different bottom gases. The product has successively won the A-level project for the transformation of high-tech achievements in Shanghai.
| project | Indicator | ||
| Carbon Tetrafluoride (CF)4）Purity (volume fraction)/10-2≥ | 99.999 | 99.995 | 99.99 |
| Nitrogen (N2）Content (volume fraction)/10-6＜ | 4 | 20 | 40 |
| Oxygen+Argon (O2+Ar) content (volume fraction)/10-6＜ | 1 | 5 | 10 |
| Carbon dioxide (CO)2）Content (volume fraction)/10-6＜ | 1 | 5 | 10 |
| Carbon monoxide (CO) content (volume fraction)/10-6＜ | 0.1 | 0.5 | 1 |
| Sulfur hexafluoride (SF)6）Content (volume fraction)/10-6＜ | 1 | 1 | 5 |
| Moisture (H)2O) Content (volume fraction)/Content, 10-6＜ | 3 | 5 | 10 |
| Acidity (calculated as HF) Content (volume fraction)/10-6＜ | 0.1 | 0.3 | 0.3 |
| Other halogenated carbon compoundsaContent (volume fraction)/10-6＜ | 1 | 10 | 30 |
| Total impurity content (volume fraction)/l0-6 ≤ | 10 | 50 | 10 |
| particle | Both supply and demand parties agree | Both supply and demand parties agree | Both supply and demand parties agree |
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Other halogenated carbon compounds include hexafluoroethane, octafluoropropane, etc.
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